Publication Information

Title:
Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 36, 01A109 (2018)
Date:
2017-11-06

Author Information

Name Institution
Julian PilzGraz University of Technology
Alberto PerrottaGraz University of Technology
Paul ChristianGraz University of Technology
Martin TazreiterGraz University of Technology
Roland ReselGraz University of Technology
G√ľnther LeisingGraz University of Technology
Thomas GriesserUniversity of Leoben
Anna Maria CocliteGraz University of Technology

Films

Plasma ZnO


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Extinction Coefficient
Analysis: Ellipsometry

Characteristic: Band Gap
Analysis: UV-VIS Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Substrates

Si(100)

Keywords

Notes

1413