Julian Pilz Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Julian Pilz returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
2Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
3Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
4ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
5Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition