Publication Information

Title:
Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
Type:
Journal
Info:
Nanoscale Research Letters 2013, 8:79
Date:
2013-01-04

Author Information

Name Institution
Riyanto EdyDonghua University
Xiaojiang HuangDonghua University
Ying GuoDonghua University
Jing ZhangDonghua University
Jianjun ShiDonghua University

Films

Thermal Al2O3


Plasma Al2O3


Film/Plasma Properties

Characteristic: Wetting Angle
Analysis: Sessile Drop Tests

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy

Substrates

PET, Polyethylene Terephthalate

Keywords

Nucleation

Notes

185