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Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
Type:
Journal
Info:
Nanoscale Research Letters 2013, 8:79
Date:
2013-01-04
Author Information
| Name | Institution |
|---|---|
| Riyanto Edy | Donghua University |
| Xiaojiang Huang | Donghua University |
| Ying Guo | Donghua University |
| Jing Zhang | Donghua University |
| Jianjun Shi | Donghua University |
Films
Thermal Al2O3
Plasma Al2O3
Film/Plasma Properties
Characteristic: Wetting Angle
Analysis: Sessile Drop Tests
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Substrates
| PET, Polyethylene Terephthalate |
Notes
| 185 |