Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition

Type:
Journal
Info:
physica status solidi (a) Volume 217, Issue 21, pages 2000319, 2020
Date:
2020-08-11

Author Information

Name Institution
Taher Abu AliGraz University of Technology
Julian PilzGraz University of Technology
Philipp SchäffnerJoanneum Research Forschungsgesellschaft GmbH
Markus KratzerMontanuniversität Leoben
Christian TeichertMontanuniversität Leoben
Barbara StadloberJoanneum Research Forschungsgesellschaft GmbH
Anna Maria CocliteGraz University of Technology

Films

Plasma ZnO


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Piezoelectric properties
Analysis: Custom

Characteristic: Piezoelectric properties
Analysis: PFM Piezo Force Microscopy

Substrates

ITO
Si with native oxide

Notes

1670