
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Type:
Journal
Info:
physica status solidi (a) Volume 217, Issue 21, pages 2000319, 2020
Date:
2020-08-11
Author Information
Name | Institution |
---|---|
Taher Abu Ali | Graz University of Technology |
Julian Pilz | Graz University of Technology |
Philipp Schäffner | Joanneum Research Forschungsgesellschaft GmbH |
Markus Kratzer | Montanuniversität Leoben |
Christian Teichert | Montanuniversität Leoben |
Barbara Stadlober | Joanneum Research Forschungsgesellschaft GmbH |
Anna Maria Coclite | Graz University of Technology |
Films
Plasma ZnO
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Refractive Index
Analysis: Ellipsometry
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Piezoelectric properties
Analysis: Custom
Characteristic: Piezoelectric properties
Analysis: PFM Piezo Force Microscopy
Substrates
ITO |
Si with native oxide |
Notes
1670 |