Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic

Type:
Journal
Info:
Plasma Science and Technology, Vol.14, No.2, 2012
Date:
2011-11-04

Author Information

Name Institution
Wenwen LeiBeijing Institute of Graphic Communication
Xingcun LiBeijing Institute of Graphic Communication
Qiang ChenBeijing Institute of Graphic Communication
Zhengduo WangBeijing Institute of Graphic Communication

Films


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Oxygen Transmission Rate (OTR)
Analysis: Oxygen Transmission Rate (OTR)

Characteristic: Wetting Angle
Analysis: Contact Angle Measurement

Substrates

PET, Polyethylene Terephthalate

Keywords

Diffusion Barrier

Notes

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