Publication Information

Title:
Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
Type:
Journal
Info:
Plasma Science and Technology, Vol.14, No.2, 2012
Date:
2011-11-04

Author Information

Name Institution
Wenwen LeiBeijing Institute of Graphic Communication
Xingcun LiBeijing Institute of Graphic Communication
Qiang ChenBeijing Institute of Graphic Communication
Zhengduo WangBeijing Institute of Graphic Communication

Films

Plasma Al2O3


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Oxygen Transmission Rate (OTR)
Analysis: Oxygen Transmission Rate (OTR)

Characteristic: Wetting Angle
Analysis: Contact Angle Measurement

Substrates

PET, Polyethylene Terephthalate

Keywords

Diffusion Barrier

Notes

661