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Publication Information

Title: Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic

Type: Journal

Info: Plasma Science and Technology, Vol.14, No.2, 2012

Date: 2011-11-04

DOI: http://dx.doi.org/10.1088/1009-0630/14/2/09

Author Information

Name

Institution

Beijing Institute of Graphic Communication

Beijing Institute of Graphic Communication

Beijing Institute of Graphic Communication

Beijing Institute of Graphic Communication

Films

Deposition Temperature = 25C

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Horiba Jobin Yvon

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Veeco AFM

Oxygen Transmission Rate (OTR)

Oxygen Transmission Rate (OTR)

Systech Illinois Oxygen permeation analyzer 8001

Wetting Angle

Contact Angle Measurement

Kruss

Substrates

PET, Polyethylene Terephthalate

Keywords

Diffusion Barrier

Notes

661



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