December 2022 Stats


The publication database currently has 1658 entries.
204 Films
274 Precursors
78 Dep Hardware Sets
253 Characteristics
91 Theses
5093 Authors

Use Advanced Search for more complex searches


2021 Year in Review
ALD Links
Contact Us
LinkedIn Profile

Recent Database Additions
Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition Optimization of Y2O3 dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices

Qiang Chen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qiang Chen returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
2Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
3Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
4Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
5Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
6Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
7Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
8Study on deposition of Al2O3 films by plasma-assisted atomic layer with different plasma sources

© 2014-2023 plasma-ald.com