Qiang Chen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qiang Chen returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
2Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
3Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
4Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
5Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
6Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
7Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
8Study on deposition of Al2O3 films by plasma-assisted atomic layer with different plasma sources