December 2022 Stats

The publication database currently has 1658 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5093 Authors

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2021 Year in Review

Recent Database Additions

Properties and Mechanism of PEALD-In₂O₃ Thin Films Prepared by Different Precursor Reaction Energy Uniformity of HfO₂ Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition Optimization of Y₂O₃ dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy Innovative remote plasma source for atomic layer deposition for GaN devices

Qiang Chen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qiang Chen returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic Layer Deposition Al₂O₃ Thin Films in Magnetized Radio Frequency Plasma Source
2	Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
3	Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al₂O₃ Thin Films
4	Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al₂O₃
5	Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
6	Plasma-Assisted ALD of an Al₂O₃ Permeation Barrier Layer on Plastic
7	Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
8	Study on deposition of Al₂O₃ films by plasma-assisted atomic layer with different plasma sources