Publication Information

Title: Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets

Type: Journal

Info: Flex. Print. Electron. 2 (2017) 022001

Date: 2017-04-03

DOI: https://doi.org/10.1088/2058-8585/aa6add

Author Information

Name

Institution

Beijing Institute of Graphic Communication

Beijing Institute of Graphic Communication

Beijing Institute of Graphic Communication

Beijing Institute of Graphic Communication

Beijing Institute of Graphic Communication

Queensland University of Technology

Queensland University of Technology

Beijing Institute of Graphic Communication

Films

Other Al2O3 using Custom

Deposition Temperature Range = 50-110C

7782-44-7

75-24-1

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Veeco diInnova

Wetting Angle

Contact Angle Measurement

DSA 100

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

VG Scientific ESCALAB 220iXL

Thickness

Ellipsometry

Horiba Jobin Yvon UVISEL

Refractive Index

Ellipsometry

Horiba Jobin Yvon UVISEL

Diffusion Barrier Properties

Water Vapor Transmission Rate (WVTR)

Mocon Aquatron Model 1

Substrates

PET, Polyethylene Terephthalate

Si(100)

Keywords

Diffusion Barrier

Encapsulation

Notes

1018



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