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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
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Lijun Sang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lijun Sang returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
2Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate
3Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
4Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
5Study on deposition of Al2O3 films by plasma-assisted atomic layer with different plasma sources
6Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma