Lizhen Yang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lizhen Yang returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
2Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
3Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
4Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate
5Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films