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Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma

Type:
Journal
Info:
Chem. Mater. 2015, 27, 5988-5996
Date:
2015-08-14
DOI:
http://dx.doi.org/10.1021/acs.chemmater.5b02137

Author Information

Name Institution
Zheng GuoBeijing Institute of Graphic Communication
Hao LiPeking University
Qiang ChenBeijing Institute of Graphic Communication
Lijun SangBeijing Institute of Graphic Communication
Lizhen YangBeijing Institute of Graphic Communication
Zhongwei LiuBeijing Institute of Graphic Communication
Xinwei WangPeking University

Films

Plasma Cu

Hardware used: Custom
copper(I)-N,N'-diisopropylacetamidinate, (Cu(amd))
CAS#: 0-0-0
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature Range = 50-140C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Profilometry
Diagnostic: Dektak

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Advance

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi SU-8020

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi SU-8020

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi SU-8020

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Veeco diInnova

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: RTS-8 Four Point Probe

Characteristic: Deposition Kinetics, Reaction Mechanism
Analysis: QCM, Quartz Crystal Microbalance
Diagnostic: Inficon SQC-310 QCM

Characteristic: Deposition Kinetics, Reaction Mechanism
Analysis: OES, Optical Emission Spectroscopy
Diagnostic: Acton SpectroPro SP-2500

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2100

Characteristic: Microstructure
Analysis: Electron Diffraction
Diagnostic: JEOL 2100

Substrates

Silicon
Glass

Notes

504