Lizhen Yang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lizhen Yang returned 5 record(s).

Number	Title
1	Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
2	Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
3	Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
4	Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
5	Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate