Inductively coupled plasma sources from Plasma ALD, LLC.


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Hao Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hao Li returned 1 record(s).

NumberTitle
1Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma