Xingcun Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xingcun Li returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Study on deposition of Al2O3 films by plasma-assisted atomic layer with different plasma sources
2Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
3Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
4Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3