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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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Xingcun Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xingcun Li returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Study on deposition of Al2O3 films by plasma-assisted atomic layer with different plasma sources
2Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
3Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
4Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3