Xingcun Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xingcun Li returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
2Study on deposition of Al2O3 films by plasma-assisted atomic layer with different plasma sources
3Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
4Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3