Wenwen Lei Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wenwen Lei returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
2Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
3Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic