Wenwen Lei Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wenwen Lei returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
2Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
3Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition