Publication Information

Title:
From Precursor Chemistry to Gas Sensors: Plasma-Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications
Type:
Journal
Info:
Small 2020, 1907506
Date:
2020-03-30

Author Information

Name Institution
Lukas MaiRuhr-University Bochum
Felix MitschkerRuhr-University Bochum
Claudia BockRuhr-University Bochum
Alessia Niesenparagon GmbH & Co
Engin CiftyurekHeinrich-Heine-University Düsseldorf
Detlef RogallaRuhr-University Bochum
Johannes Micklerparagon GmbH & Co
Matthias Erigparagon GmbH & Co
Zheshen LiAarhus University
Peter AwakowiczRuhr-University Bochum
Klaus SchierbaumHeinrich-Heine-University Düsseldorf
Anjana DeviRuhr-University Bochum

Films

Plasma ZnO


Film/Plasma Properties

Characteristic: Precursor Characterization
Analysis: NMR, Nuclear Magnetic Resonance

Characteristic: Precursor Characterization
Analysis: TGA, Thermo Gravimetric Analysis

Characteristic: Precursor Characterization
Analysis: Vapor Pressure

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry

Characteristic: Chemical Composition, Impurities
Analysis: NRA, Nuclear Reaction Analysis

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy

Characteristic: Diffusion Barrier Properties
Analysis: Oxygen Transmission Rate (OTR)

Characteristic: Gas Sensing
Analysis: Custom

Substrates

Si(100)
PET, Polyethylene Terephthalate

Keywords

Sensors

Notes

1511