Your search for plasma enhanced atomic layer deposition publications authored by Felix Mitschker returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD|
|2||An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor|
|3||PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads|
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