Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
Type:
Journal
Info:
IEEE ELECTRON DEVICE LETTERS, VOL. 33, NO. 2, PP. 203-205, 2012
Date:
2011-10-29
Author Information
| Name | Institution |
|---|---|
| S. M. Sultan | University of Southampton |
| K. Sun | University of Southampton |
| O. D. Clark | University of Southampton |
| T. B. Masaud | University of Southampton |
| Qi Fang | Oxford Instruments |
| R. Gunn | Oxford Instruments |
| J. Partridge | University of Canterbury |
| M. W. Allen | University of Canterbury |
| P. Ashburn | University of Southampton |
| H. M. H. Chong | University of Southampton |
Films
Plasma ZnO
Film/Plasma Properties
Characteristic: Mobility
Analysis: I-V, Current-Voltage Measurements
Substrates
Notes
| 645 |