Search Plasma ALD Publication Database By...

Publication Information

Title: Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD

Type: Journal

Info: IEEE ELECTRON DEVICE LETTERS, VOL. 33, NO. 2, PP. 203-205, 2012

Date: 2011-10-29

DOI: http://dx.doi.org/10.1109/LED.2011.2174607

Author Information

Name

Institution

University of Southampton

University of Southampton

University of Southampton

University of Southampton

Oxford Instruments

Oxford Instruments

University of Canterbury

University of Canterbury

University of Southampton

University of Southampton

Films

Deposition Temperature = 150C

557-20-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Mobility

I-V, Current-Voltage Measurements

Unknown

Substrates

Keywords

Notes

645


Follow @PlasmaALDGuy
Mark Sowa

Shortcuts



© 2014-2018 plasma-ald.com