Publication Information

Title:
Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
Type:
Journal
Info:
IEEE ELECTRON DEVICE LETTERS, VOL. 33, NO. 2, PP. 203-205, 2012
Date:
2011-10-29

Author Information

Name Institution
S. M. SultanUniversity of Southampton
K. SunUniversity of Southampton
O. D. ClarkUniversity of Southampton
T. B. MasaudUniversity of Southampton
Qi FangOxford Instruments
R. GunnOxford Instruments
J. PartridgeUniversity of Canterbury
M. W. AllenUniversity of Canterbury
P. AshburnUniversity of Southampton
H. M. H. ChongUniversity of Southampton

Films

Plasma ZnO


Film/Plasma Properties

Characteristic: Mobility
Analysis: I-V, Current-Voltage Measurements

Substrates

Keywords

Notes

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