Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

S. M. Sultan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. M. Sultan returned 4 record(s).

NumberTitle
1Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
2Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
3Top-down fabricated ZnO nanowire transistors for application in biosensors
4Hysteresis behaviour of top-down fabricated ZnO nanowire transistors