Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

M. W. Allen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. W. Allen returned 1 record(s).

NumberTitle
1Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD