R. Gunn Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. Gunn returned 3 record(s).

Number	Title
1	Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
2	Preliminary investigation of high-k materials - TiO₂ doped Ta₂O₅ films by remote plasma ALD
3	Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD