Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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K. Sun Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by K. Sun returned 3 record(s).

NumberTitle
1Top-down fabricated ZnO nanowire transistors for application in biosensors
2Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
3Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD