Qi Fang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qi Fang returned 4 record(s).

Number	Title
1	Preliminary investigation of high-k materials - TiO₂ doped Ta₂O₅ films by remote plasma ALD
2	Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
3	Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
4	A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films