Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

P. Ashburn Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. Ashburn returned 4 record(s).

NumberTitle
1Top-down fabricated ZnO nanowire transistors for application in biosensors
2Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
3Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
4Hysteresis behaviour of top-down fabricated ZnO nanowire transistors