Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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O. D. Clark Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by O. D. Clark returned 2 record(s).

NumberTitle
1Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
2Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD