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Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
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Publication Information
Title:
Top-down fabricated ZnO nanowire transistors for application in biosensors
Type:
Journal
Info:
2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC), 137
Date:
2012-09-07
Author Information
| Name | Institution |
|---|---|
| S. M. Sultan | University of Southampton |
| K. Sun | University of Southampton |
| M. R. R. de Planque | University of Southampton |
| P. Ashburn | University of Southampton |
| H. M. H. Chong | University of Southampton |
Films
Plasma ZnO
Film/Plasma Properties
Characteristic: Transistor Characteristics
Analysis: Transistor Characterization
Substrates
| SiO2 |
Keywords
| Nanowire Transistors |
Notes
| 671 |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |