Search Plasma ALD Publication Database By...

Publication Information

Title: Top-down fabricated ZnO nanowire transistors for application in biosensors

Type: Journal

Info: 2012 Proceedings of the European Solid-State Device Research Conference (ESSDERC), 137

Date: 2012-09-07

DOI: http://dx.doi.org/10.1109/ESSDERC.2012.6343352

Author Information

Name

Institution

University of Southampton

University of Southampton

University of Southampton

University of Southampton

University of Southampton

Films

Deposition Temperature = 100C

557-20-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Transistor Characteristics

Transistor Characterization

Unknown

Substrates

SiO2

Keywords

Nanowire Transistors

Notes

671


Follow @PlasmaALDGuy
Mark Sowa

Shortcuts



© 2014-2018 plasma-ald.com