Publication Information

Title:
Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
Type:
Journal
Info:
Nanoscale Research Letters (2017) 12:541
Date:
2017-09-08

Author Information

Name Institution
Ruomeng HuangUniversity of Southampton
Sheng YeUniversity of Southampton
Kai SunUniversity of Southampton
Kian S. KiangUniversity of Southampton
C.H. de GrootUniversity of Southampton

Films

Thermal ZnO


Other ZnO


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Refractive Index
Analysis: Ellipsometry

Characteristic: Extinction Coefficient
Analysis: Ellipsometry

Characteristic: Resistivity, Sheet Resistance
Analysis: Hall Measurements

Characteristic: Carrier Concentration
Analysis: Hall Measurements

Characteristic: Mobility
Analysis: Hall Measurements

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: VCPD - Contact Potential Difference
Analysis: Scanning Kelvin Probe Microscopy (SKPM)

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Substrates

SiO2

Keywords

Notes

1080