Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
Type:
Journal
Info:
Nanoscale Research Letters (2017) 12:541
Date:
2017-09-08
Author Information
| Name | Institution |
|---|---|
| Ruomeng Huang | University of Southampton |
| Sheng Ye | University of Southampton |
| Kai Sun | University of Southampton |
| Kian S. Kiang | University of Southampton |
| C.H. de Groot | University of Southampton |
Films
Thermal ZnO
Other ZnO
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Refractive Index
Analysis: Ellipsometry
Characteristic: Extinction Coefficient
Analysis: Ellipsometry
Characteristic: Resistivity, Sheet Resistance
Analysis: Hall Measurements
Characteristic: Carrier Concentration
Analysis: Hall Measurements
Characteristic: Mobility
Analysis: Hall Measurements
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: VCPD - Contact Potential Difference
Analysis: Scanning Kelvin Probe Microscopy (SKPM)
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Substrates
| SiO2 |
Notes
| 1080 |