Publication Information

Title: Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition

Type: Journal

Info: Nanoscale Research Letters (2017) 12:541

Date: 2017-09-08

DOI: http://dx.doi.org/10.1186/s11671-017-2308-1

Author Information

Name

Institution

University of Southampton

University of Southampton

University of Southampton

University of Southampton

University of Southampton

Films

Deposition Temperature = 190C

557-20-0

7732-18-5

Deposition Temperature = 190C

557-20-0

7732-18-5

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000

Refractive Index

Ellipsometry

J.A. Woollam M-2000

Extinction Coefficient

Ellipsometry

J.A. Woollam M-2000

Resistivity, Sheet Resistance

Hall Measurements

Nanometrics HL5500

Carrier Concentration

Hall Measurements

Nanometrics HL5500

Mobility

Hall Measurements

Nanometrics HL5500

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Rigaku Smartlab

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Thermo VG-Scientific theta probe

VCPD - Contact Potential Difference

Scanning Kelvin Probe Microscopy (SKPM)

Nanonics CV2000

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Unknown

Substrates

SiO2

Keywords

Notes

1080



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