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Publication Information

Title: Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications

Type: Journal

Info: Microelectronic Engineering 97 (2012) 162 - 165

Date: 2012-05-28

DOI: http://dx.doi.org/10.1016/j.mee.2012.04.019

Author Information

Name

Institution

University of Southampton

University of Southampton

University of Southampton

Oxford Instruments

Oxford Instruments

University of Southampton

University of Southampton

University of Southampton

University of Southampton

Films

Deposition Temperature = 150C

557-20-0

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Mobility

Hall Measurements

Unknown

Resistivity, Sheet Resistance

Hall Measurements

Unknown

Substrates

SiO2

Quartz

Keywords

Notes

664


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