R. Gunn Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. Gunn returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
2Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
3Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications