Ziwen Fang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ziwen Fang returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
2Gadolinium nitride films deposited using a PEALD based process
3Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
4Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications