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An economical, compact inductively coupled plasma source.

Ideal for:
  • Plasma-Enhanced Atomic Layer Deposition
  • Thin Film Etch
  • Surface cleaning
  • Surface modification

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S. M. Sultan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. M. Sultan returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications
2Electrical Characteristics of Top-Down ZnO Nanowire Transistors Using Remote Plasma ALD
3Hysteresis behaviour of top-down fabricated ZnO nanowire transistors
4Top-down fabricated ZnO nanowire transistors for application in biosensors