Publication Information

Title: Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition

Type: Journal

Info: Phys. Rev. Lett. 16, 135-139, 2017

Date: 2016-12-12

DOI: http://dx.doi.org/10.1109/TNANO.2016.2638447

Author Information

Name

Institution

University of Alberta

University of Alberta

University of Alberta

University of Alberta

University of Alberta

Films

Deposition Temperature = 200C

557-20-0

7782-44-7

Deposition Temperature = 200C

557-20-0

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

I-V Plots

I-V, Current-Voltage Measurements

Unknown

Substrates

Cu

Keywords

Plasma vs Thermal Comparison

Notes

Some information from the paper is included in section 5.2 of the on-line thesis Schottky Nanodiodes Based on Zinc Oxide Thin Films.

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