Publication Information

Title:
Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2017, 9 (39), pp 33429-33436
Date:
2017-04-17

Author Information

Name Institution
Matthew D. SampsonArgonne National Laboratory
Jonathan D. EmeryArgonne National Laboratory
Michael J. PellinArgonne National Laboratory
Alex B. F. MartinsonArgonne National Laboratory

Films

Thermal Al2O3


Other Al2O3


Thermal MnOx


Other MnOx


Thermal ZnO


Other ZnO


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: XRF, X-Ray Fluorescence

Substrates

Silicon
Au
1-Dodecanethiol

Keywords

Area Selective

Notes

1399