2021 Year in Review

The publication database currently has 1628 entries.

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203 Films Compositions

272 Precursors and Plasma Gases

77 Deposition Hardwares

251 Film and Plasma Characteristics

90 Theses

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Effect of atomic layer plasma treatment on TALD-ZrO₂ film to improve the corrosion protection of Mg-Ca alloy Deposition and Characterization of RP-ALD SiO₂ Thin Films with Different Oxygen Plasma Powers Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation

Search 1628 plasma ALD publications by:

203 Films Compositions

272 Precursors and Plasma Gases

77 Deposition Hardwares

251 Film and Plasma Characteristics

Bis(ethylcyclopentadienyl)manganese, CAS# 101923-26-6

Where to buy

Number	Vendor	Link
1	Ereztech	Bis(ethylcyclopentadienyl) manganese
2	Strem Chemicals, Inc.	Bis(ethylcyclopentadienyl)manganese, min. 98%

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Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide