Title: Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
Type: Journal
Info: Applied Surface Science 328 (2015) 344 - 348
Date: 2014-12-08
DOI: http://dx.doi.org/10.1016/j.apsusc.2014.12.044
Name
Institution
University of Alberta
University of Alberta
Characteristic
Analysis
Diagnostic
Thickness
Ellipsometry
J.A. Woollam M-2000D
Dielectric Constant, Permittivity
Ellipsometry
J.A. Woollam M-2000D
Chemical Composition, Impurities
XPS, X-ray Photoelectron Spectroscopy
Kratos Analytical Axis Ultra DLD
Silicon
In situ ellipsometry study of ZrN PEALD with Kurt J. Lesker ALD150LX.
341
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com
© 2014-2018 plasma-ald.com