Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
Type:
Journal
Info:
Applied Surface Science 328 (2015) 344 - 348
Date:
2014-12-08
Author Information
Name | Institution |
---|---|
Triratna Muneshwar | University of Alberta |
Kenneth C. Cadien | University of Alberta |
Films
Plasma ZrN
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Dielectric Constant, Permittivity
Analysis: Ellipsometry
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Substrates
Silicon |
Keywords
Notes
In situ ellipsometry study of ZrN PEALD with Kurt J. Lesker ALD150LX. |
341 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
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Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |