ZrN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing ZrN films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
2	Barrier Characteristics of ZrN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(diethylamino)zirconium Precursor
3	Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth
4	Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma
5	Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
6	Tuning The Photoactivity of Zirconia Nanotubes-Based Photoanodes via Ultrathin Layers of ZrN: An Effective Approach toward Visible-Light Water Splitting

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