Your search for plasma enhanced atomic layer deposition publications discussing ZrN films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments|
|2||Barrier Characteristics of ZrN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Using Tetrakis(diethylamino)zirconium Precursor|
|3||Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth|
|4||Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma|
|5||Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry|
|6||Tuning The Photoactivity of Zirconia Nanotubes-Based Photoanodes via Ultrathin Layers of ZrN: An Effective Approach toward Visible-Light Water Splitting|
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