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Publication Information

Title: AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments

Type: Journal

Info: Journal of Applied Physics 119, 085306 (2016)

Date: 2016-02-08

DOI: http://dx.doi.org/10.1063/1.4942439

Author Information

Name

Institution

University of Alberta

University of Alberta

Films

Deposition Temperature = 100C

19962-11-9

7782-44-7

Deposition Temperature = 150C

19756-04-8

1333-74-0

7727-37-9

Deposition Temperature = 100C

75-24-1

7732-18-5

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

J.A. Woollam M-2000DI

Substrates

Keywords

Notes

783



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