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The publication database currently has 1567 entries.

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265 Precursors and Plasma Gases

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In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films

Search 1567 plasma ALD publications by:

195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

Amir Afshar Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Amir Afshar returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Electrical Comparison of HfO₂ and ZrO₂ Gate Dielectrics on GaN
2	High Mobility (210cm²/Vs), High Capacitance (7.2uF/cm²) ZrO₂ on GaN Metal Oxide Semiconductor Capacitor via ALD
3	Impact of Post Fabrication Annealing PEALD ZrO₂ for GaN MOSFETs
4	Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
5	Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
6	Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
7	ZrO₂ on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition