Amir Afshar Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Amir Afshar returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
2High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
3Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
4Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
5Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
6Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
7ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition