Amir Afshar Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Amir Afshar returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
2Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
3Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
4ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
5Performance of Nanocrystal ZnO Thin-Film Schottky Contacts on Cu by Atomic Layer Deposition
6High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
7Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN