Name

Institution

Kyle Bothe

University of Alberta

A. Ma

University of Alberta

Amir Afshar

University of Alberta

Pouyan Motamedi

University of Alberta

Ken Cadien

University of Alberta

Douglas W. Barlage

University of Alberta

Plasma ZrO₂ using Kurt J Lesker ALD-150L

Deposition Temperature = 100C

TDMAZ, Tetrakis[(DiMethyl)Amido] Zirconium, [Me₂N]₄Zr

19756-04-8

Where to buy precursor

Oxygen, O₂

7782-44-7

Plasma AlN using Kurt J Lesker ALD-150L

Deposition Temperature = 250C

TMA, Trimethyl Aluminum, Trimethylalane, Trimethylaluminium, Aluminium Trimethyl, Aluminum Trimethanide, Al(CH₃)₃, AlMe₃, Al₂(CH₃)₆, Al₂Me₆

75-24-1

Where to buy precursor

Nitrogen, N₂

7727-37-9

Characteristic

Analysis

Diagnostic

Interface Trap Density

C-V, Capacitance-Voltage Measurements

Unknown

Hysteresis

C-V, Capacitance-Voltage Measurements

Unknown

Contact Resistance

C-V, Capacitance-Voltage Measurements

Unknown

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