Title: Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
Type: Conference Proceedings
Info: CS MANTECH Conference, May 18th - 21st, 2015
Date: 2015-05-18
DOI: http://www.csmantech.org/Digests/2015/papers/9.4-051.pdf
Name
Institution
University of Alberta
University of Alberta
University of Alberta
University of Alberta
University of Alberta
University of Alberta
Characteristic
Analysis
Diagnostic
Interface Trap Density
C-V, Capacitance-Voltage Measurements
Unknown
Hysteresis
C-V, Capacitance-Voltage Measurements
Unknown
Contact Resistance
C-V, Capacitance-Voltage Measurements
Unknown
362
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