A. Ma Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by A. Ma returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices |
| 2 | Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs |