Your search for plasma enhanced atomic layer deposition publications authored by A. Ma returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs|
|2||Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices|
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