2022 Year in Review

February 2023 Stats


The publication database currently has 1673 entries.
204 Films
279 Precursors
78 Dep Hardware Sets
253 Characteristics
91 Theses
5136 Authors

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2021 Year in Review
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Recent Database Additions
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes

Pouyan Motamedi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Pouyan Motamedi returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition
2In Situ Synchrotron X-Ray Diffraction Analysis of Phase Transformation in Epitaxial Metastable hcp Nickel Thin Films, Prepared via Plasma-Enhanced Atomic Layer Deposition
3Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
4Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
5Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
6Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
7Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
8Structural and optical characterization of low-temperature ALD crystalline AlN
9Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
10A route to low temperature growth of single crystal GaN on sapphire

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