Publication Information

Title:
Structural and optical characterization of low-temperature ALD crystalline AlN
Type:
Journal
Info:
Journal of Crystal Growth 421 (2015) 45 - 52
Date:
2015-04-07

Author Information

Name Institution
Pouyan MotamediUniversity of Alberta
Ken CadienUniversity of Alberta

Films

Plasma AlN


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Optical Properties
Analysis: Ellipsometry

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy

Substrates

Si(100)
Si(111)
Sapphire

Keywords

Notes

357