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Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
Type:
Conference Proceedings
Info:
IEEE J. Electron Dev. Soc., Vol. 59, No. 10, May 2014, pp. 2662
Date:
2014-05-19
Author Information
| Name | Institution |
|---|---|
| Kevin Voon | University of Alberta |
| Kyle Bothe | University of Alberta |
| Pouyan Motamedi | University of Alberta |
| Douglas W. Barlage | University of Alberta |
| Kenneth C. Cadien | University of Alberta |
Films
Plasma AlN
Film/Plasma Properties
Characteristic: Unknown
Analysis: I-V, Current-Voltage Measurements
Characteristic: Unknown
Analysis: C-V, Capacitance-Voltage Measurements
Substrates
| GaN |
Notes
| 363 |