Kyle Bothe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kyle Bothe returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
2ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
3Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
4Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
5Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
6Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
7Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN