Kyle Bothe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kyle Bothe returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
2Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
3High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
4Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
5Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
6Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
7ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition


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