2022 Year in Review

May 2023 Stats


The publication database currently has 1686 entries.
208 Films
282 Precursors
78 Dep Hardware Sets
254 Characteristics
93 Theses
5172 Authors

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2021 Year in Review
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Recent Database Additions
Correlation between ferroelectricity and ferroelectric orthorhombic phase of HfxZr1-xO2 thin films using synchrotron x-ray analysis Experimental and theoretical determination of the role of ions in atomic layer annealing Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature

Kyle Bothe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kyle Bothe returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
2Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
3ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition
4High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
5Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
6Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
7Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN

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