Kyle Bothe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kyle Bothe returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
2	Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
3	High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
4	Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
5	Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
6	Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
7	ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition

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