Name

Institution

Meng-Chen Tsai

National Taiwan University

Min-Hung Lee

National Taiwan Normal University

Chin-Lung Kuo

National Taiwan University

Hsin-Chih Lin

National Taiwan University

Miin-Jang Chen

National Taiwan University

Plasma ZrO₂ using Unknown

Deposition Temperature Range N/A

Plasma ZrON using Unknown

Deposition Temperature Range N/A

Characteristic

Analysis

Diagnostic

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

-

Leakage Current

I-V, Current-Voltage Measurements

-

CET, capacitance equivalent thickness

C-V, Capacitance-Voltage Measurements

-

Dielectric Constant, Permittivity

C-V, Capacitance-Voltage Measurements

-

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

-

Interlayer

TEM, Transmission Electron Microscope

-

Si(100)

ZrO₂

ZrON

865