Publication Information

Title:
Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
Type:
Journal
Info:
Scientific Reports 7, Article number: 40061 (2016)
Date:
2016-11-30

Author Information

Name Institution
Zheng ChenJilin University
Haoran WangJilin University
Xiao WangJilin University
Ping ChenJilin University
Yunfei LiuJilin University
Hongyu ZhaoJilin University
Yi ZhaoJilin University
Yu DuanJilin University

Films



Film/Plasma Properties

Characteristic: Thickness
Analysis: QCM, Quartz Crystal Microbalance

Characteristic: Gas Phase Species
Analysis: QMS, Quadrupole Mass Spectrometer

Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test

Substrates

PET, Polyethylene Terephthalate
Zircone
Silicon

Keywords

Encapsulation

Notes

876