Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
Type:
Journal
Info:
Scientific Reports 7, Article number: 40061 (2016)
Date:
2016-11-30
Author Information
| Name | Institution |
|---|---|
| Zheng Chen | Jilin University |
| Haoran Wang | Jilin University |
| Xiao Wang | Jilin University |
| Ping Chen | Jilin University |
| Yunfei Liu | Jilin University |
| Hongyu Zhao | Jilin University |
| Yi Zhao | Jilin University |
| Yu Duan | Jilin University |
Films
Plasma ZrO2
Thermal Zircone
Film/Plasma Properties
Characteristic: Thickness
Analysis: QCM, Quartz Crystal Microbalance
Characteristic: Gas Phase Species
Analysis: QMS, Quadrupole Mass Spectrometer
Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Substrates
| PET, Polyethylene Terephthalate |
| Zircone |
| Silicon |
Notes
| 876 |