Zircone Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Zircone films returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

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1Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes


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