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Kemicro PEALD-150 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Kemicro PEALD-150 hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes


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