Your search for plasma enhanced atomic layer deposition publications using Kemicro PEALD-150 hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes|
|2||The Cut-Off Phenomenon Effect on ZrO2 Growth Using Remote Plasma-Enhanced Atomic Layer Deposition|
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