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Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy

Type:
Journal
Info:
Surface & Coatings Technology 427 (2021) 127811
Date:
2021-10-09
DOI:
https://doi.org/10.1016/j.surfcoat.2021.127811

Author Information

Name Institution
P. C. LinNational Taiwan University
K. F. LinNational Taiwan University
C. ChiuNational Taiwan University
V. I. SemenovUfa State Aviation Technical University
Hsin-Chih LinNational Taiwan University
Miin-Jang ChenNational Taiwan University

Films

Thermal ZrO2

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TDMAZr, (Me2N)4Zr, [(CH3)2N]4Zr, Tetrakis(DiMethylAmido) Zirconium, Zirconium Dimethylamide
CAS#: 19756-04-8
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 250C

Other ZrO2

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TDMAZr, (Me2N)4Zr, [(CH3)2N]4Zr, Tetrakis(DiMethylAmido) Zirconium, Zirconium Dimethylamide
CAS#: 19756-04-8
H2O, Water
CAS#: 7732-18-5
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 250C

Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Rigaku TTRAX III

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Rigaku TTRAX III

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: VG Scientific ESCALAB 250

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Technai F20

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Technai F20

Characteristic: Electrochemical Performance
Analysis: EIS, Electrochemical Impedance Spectroscopy
Diagnostic: Metrohm Autolab PGSTAT204

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: FEI Nova NanoSEM 450

Characteristic: Corrosion
Analysis: EPMA, Electron Probe Micro Analyzer
Diagnostic: JEOL JXA-8530F

Substrates

Mg-Ca

Notes

1628