Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy

Type:
Journal
Info:
Surface & Coatings Technology 427 (2021) 127811
Date:
2021-10-09

Author Information

Name Institution
P. C. LinNational Taiwan University
K. F. LinNational Taiwan University
C. ChiuNational Taiwan University
V. I. SemenovUfa State Aviation Technical University
Hsin-Chih LinNational Taiwan University
Miin-Jang ChenNational Taiwan University

Films



Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope

Characteristic: Electrochemical Performance
Analysis: EIS, Electrochemical Impedance Spectroscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Corrosion
Analysis: EPMA, Electron Probe Micro Analyzer

Substrates

Mg-Ca

Notes

1628