Publication Information

Title: Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing

Type: Journal

Info: Journal of the European Ceramic Society 37 (2017) 1135 - 1139

Date: 2016-10-22

DOI: https://doi.org/10.1016/j.jeurceramsoc.2016.10.028

Author Information

Name

Institution

National Taiwan University

National Taiwan University

National Taiwan University

National Taiwan University

Films

Deposition Temperature = 300C

19756-04-8

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

Ellipsometry

Ellipso Technology Elli-SE

Images

TEM, Transmission Electron Microscope

JEOL 2010F

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

GIXRD, Grazing Incidence X-Ray Diffraction

Rigaku TTRAX III

Ferroelectricity

Custom

aixACCT TF 2000

Substrates

Pt

Keywords

Ferroelectrics

Notes

866



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