Publication Information

Title:
Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
Type:
Journal
Info:
Journal of the European Ceramic Society 37 (2017) 1135 - 1139
Date:
2016-10-22

Author Information

Name Institution
Bo-Ting LinNational Taiwan University
Yu-Wei LuNational Taiwan University
Jay ShiehNational Taiwan University
Miin-Jang ChenNational Taiwan University

Films


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction

Characteristic: Ferroelectricity
Analysis: Custom

Substrates

Pt

Keywords

Ferroelectrics

Notes

866