Yu-Wei Lu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yu-Wei Lu returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing


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