Yu-Wei Lu Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Yu-Wei Lu returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing |